Using Finite Element Analysis to Determine the Sensitivity of a Triaxial MEMS Accelerometer

Pradeep M; Gogul R

doi:10.55529/ijrise.35.12.17

Using Finite Element Analysis to Determine the Sensitivity of a Triaxial MEMS Accelerometer

https://doi.org/10.55529/ijrise.35.12.17

Authors

Pradeep M Department of Mechanical Engineering, Government college of Engineering, thanjavur, India.
Gogul R Department of Mechanical Engineering, Government college of Engineering, thanjavur, India.

Keywords:

Sensitivity, Accelerometer, Finite Element Method, Triaxial, Ansys software, MEMS.

Abstract

It is necessary to determine the sensitivity of an accelerometer before building it. To determine the sensitivity of an accelerometer, the Finite Element Method (FEM) is used by the Ansys software. In this work, coupled field static analysis for a triaxial MEMS accelerometer is used to obtain the sensitivity of an accelerometer.

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Published

2023-08-07

How to Cite

Pradeep M, & Gogul R. (2023). Using Finite Element Analysis to Determine the Sensitivity of a Triaxial MEMS Accelerometer. International Journal of Research in Science & Engineering , 3(05), 12–17. https://doi.org/10.55529/ijrise.35.12.17